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Nanotouch
: 3-D touch probe with 5nm resolution and 20nm repeatability for coordinate
measuring machines |
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Nano 21 Project n° 5393.1 |
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Metrology
laboratories are facing an increasing demand for high precision 3D calibration
services in the field of micro- and nanotechnology. A new solution for
3D touch probes needs to be found in order to obtain the required resolution
of 5 nm and repeatability better than 20 nm. The proposed solution complies with the standards presently used in metrology. The measuring 3D touch probe uses a small probing sphere (0.2 mm or even 0.1 mm in diameter) and applies very small probing forces (which are extrapolated to zero force). Although highly sensitive, the probe must be robust for easy handling. A 1D demonstrator and a 3D prototype were realised and first tests are very encouraging. |
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Mecartex project partners : - EPFL-IPR-LSRO (Swiss Federal Institute of Technology) - METAS (Swiss Federal Office of Metrology and Accreditation) |
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Patent pending -- |
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Publications
- Downloads |
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