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MX600x series
6 degrees of freedom – 3 rotations and 3 translation (TTT/RRR)
The MX6001 is an XY-RX-RY-RZ ultra high precision manipulator with nanometric positioning resolution over 8 mm motion range XYZ and 10° in RXRYRZ.
Based on a parallel kinematics and thanks to the low inertia, this micro-positioning device reaches its first vibration mode at over 200 Hz. This makes the device well adapted to perform high dynamic tasks, such as fibber alignment.
Based on flexures, the MX4001 has no friction, no wear and no backlash. It is perfectly adapted for clean room applications
In this version, the linear actuators supply a nominal force up to 20N in all 3 translations. The optical sensor resolution is 5nm, but could be adapted.
The micro-manipulator output can be adapted to customer applications.
Characteristics:
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Workspace
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8 mm in X-Y-Z
10° in RXRYRZ |
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Linear resolution
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5 nm
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Dimensions
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280 mm x
180 mm x 185 mm |
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Actuator force
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20 N nominal
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Dynamics
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>200Hz
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A controller, based on a commercial solution, is also available to drive the manipulator.
Fields of application:
Micro-assembly, fibber alignment
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