MX300x series

3 degrees of freedom – 3 translation (TTT)

The MX3001 is an XYZ ultra high precision manipulator with nanometric positioning resolution over 8 mm motion range in three directions.
Based on a parallel kinematics and thanks to the low inertia, this micro-positioning device reaches its first vibration mode at over 400 Hz. This makes the device well adapted to perform high dynamic tasks.
Based on flexures, the MX3001 has no friction, no wear and no backlash. It is perfectly adapted for clean room applications.
In this version, the linear actuators supply a nominal force up to 20N in all 3 translations. The optical sensor resolution is 5nm.
The micro-manipulator output can be adapted to customer applications.

Characteristics:

Workspace	8 mm in X-Y-Z
Linear resolution	5 nm
Dimensions	235 mm x 235 mm x 235 mm
Actuator force	20 N nomina
Dynamics	400 Hz

Fields of application:
Micro-assembly,  scanning, laser cutting, µ-electro-discharge-machining.
A controller, based on a PC with Windows® RTX® and high level-language, is also available to drive the manipulator.

More details

»Request info

Return to list