3-D probe with nanometer resolution


With the continued trend in miniaturisation of electro-mechanical and optical systems there is an increasing demand for accurate geometrical measurements on small parts. In the last years CMMs (Coordinate Measuring Machines) have become versatile and widespread metrology tools. Today’s CMMs can efficiently perform very complex measurement tasks but up to now, limiting factors for their application on small objects were the size of the probing element, the probing force and the accuracy of the CMM-stage. A new probe for Coordinate Measuring Machines (CMM) now allows measurements with a previously unattainable accuracy.


Application fields:

  • Services for Industrial Metrology
  • MEMS (Micro-electromechanical Systems) manufacturers and users
  • Watch Industry
  • Manufacturing of micro-optics and fiber
  • Medical Devices
  • Automotive Technology



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